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Standard
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Optional
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XYZ Travel
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500 x 450 x 200 mm
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Extended Y axis, 610 mm; extended Z axis, 300 mm
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XYZ Scale Resolution
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0.1 μm
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Drive System
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DC servo with 3-axis control (X, Y, Z); with 3-axis joystick controller
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Multifunction handheld controller (in lieu of joystick)
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Worktable
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Nickel plated steel, with fixture holes, removable stage glass, 65 kg recommended max payload
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Rotary Axis
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Miniature Servo Rotary (MSR™)
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Optics*
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Fixed optical magnification with Virtual Zoom, E 8.10 standard lens
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Replacement Lenses: E 16.20 Wide Field-of-View/Long Working Distance, E 4.5 High Magnification
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Illumination
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Substage LED profile, coaxial LED surface, SmartRing LED ring light
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Conical SmartRing (included with E 4.5 lens)
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Metrology Camera
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6 megapixel color digital metrology camera
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Field of View
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7.0 mm x 5.1 mm
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E 16.20: 14.0 mm x 10.4 mm
E 4.5: 3.5 mm x 2.6 mm
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Minimum Feature Size**
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10 µm
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E 16.20: 20 µm
E 4.5: 5 µm
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Working Distance
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62 mm
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E 16.20: 110 mm
E 4.5: 31 mm
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Sensor Options
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Tactile: TP20 or TP200 Touch Probe
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Software
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Measure-X Measure and Compare
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Productivity software: Measure-X Analyze, EVOLVE® Suite (Design, Manufacturing, SmartProfile®, SPC)
Offline software: Measure-X
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System Controller
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Windows® based, with up-to-date processor and onboard networking/communication ports
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Controller Options
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24” flat panel LCD monitor, or dual 24” flat panel LCD monitors, keyboard, 3-button mouse (or user supplied)
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Power Requirements
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100-120 VAC or 200-240 VAC, 50/60 Hz, 1 phase, 700 W
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Safe Operating Environment
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15-30 °C, non-condensing
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Rated Environment
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Temperature 18-22 °C, stable to ± 1 °C, max rate of change 1 °C / hour, max vertical gradient of 1 °C / meter; 30-80% humidity; vibration
<0.001g below 15 Hz
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XY Area Accuracy
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E2 = (2.8 + 5L/1000)
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Z Linear Accuracy
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E1 = (3.8 + 5L/1000) μm
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E1 = (2.8 + 5L/1000) μm (requires optional E 4.5 lens)
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